Semiconductor Cleanroom Construction: System Ceiling and Overhead AMHS

The access floor is leveled first to a finished floor datum taken from the project benchmark, then protected. Anchor bolts go into the concrete structure above, threaded rods and turnbuckles hang the ceiling grid, and the grid is leveled to the floor datum. FFUs seat in gel seal on a knife edge, with filter faces coplanar with the grid.

After the FFUs, AMHS rails hang from the grid main tees. Tools are moved in and set on the leveled floor. Tool power runs from sub-fab panelboards through a sealed slab penetration and under the access floor to each tool's main disconnect, and process hook-up comes from below too. PROCON coordinates and installs the FFUs, the ceiling grid and the AMHS rails as one package.

In this film

1. 01Access floor and levelingBenchmark → finished floor datum, pedestal leveling, stringers and perforated panels, floor protection
2. 02Structure above and anchor boltsDrill → anchor bolt → nut and washer
3. 03Threaded rods and ceiling gridThreaded rods and turnbuckles, main tees, cross tees and connectors
4. 04Grid levelingThe floor datum carried up to the grid
5. 05Gel seal and FFUsGel seal and knife edge: FFU filter faces coplanar with the grid, blind panels and lights
6. 06Air showerGowning room → air shower → fab, interlocked doors
7. 07AMHS railsRails hung from the grid main tees after the FFUs
8. 08Equipment setting and installationTool move-in and setting
9. 09Underfloor power distribution and equipment connectionsSub-fab panelboards → sealed penetration → feeder → tool main disconnect; process hook-up from below too
10. 10Controls · communicationsTool control wiring, fiber backbone
11. 11OHT transportFOUP to the load port
12. 12Turnover supportPROCON supports the turnover